Parylene MEMS

The Parylene Subgroup works mainly on the Parylene C and Parylene AF4. Parylene C is used for 3D morphology reconstruction and positioning with its autofluorescence characteristics in the aspect of Biological applications and fabricating micropore-arrayed membranes for separation.

Members: Lingqian Zhang (leader), Yudan Pi, Haida Li, Wangzhi Dai, Han Xu and Yechang Guo.

By now, they achieved,

1. 3D morphology reconstruction of high aspect ratio MEMS structure by using autofluorescence of Parylene C

3D morphology reconstruction Figure 1: Operation process of the present 3D morphology reconstruction. (a) high aspect ratio microstructure; (b) structure coated with thin Parylene C; (c) annealing for fluorescence enhancement; (d) 3D morphology reconstruction with fluorescence signals in different depths.
Figure 2: Extracted depths of the high aspect ratio structures, with actual depths obtained by SEM measurements.

2. Fluorescently visible Parylene-C coated pipette for targeted neuronal electrophysiology

Fluorescently visible Parylene-C coated pipetteFigure 3: Fabrication process of the Parylene-C fluorescent pipette.
Figure 4: Comparison between uncoated glass pipette and Parylene-C coated pipette under different channels of fluorescence microscope.

3, Large-scale Parylene C micropore-arrayed membranes with ulta-high porosity, high aspect ratio and high size precision.

Parylene C micropore-arrayed membranesFigure 5: SEM images of the large-scale 2.5D micropore-arrayed Parylene C membranes.